Rapid Thermal Process Ovens and Vacuum Process Oven

Estamos especializados en el desarrollo de sistemas de recocido térmico rápido, principalmente para uso en I+D. Actualmente ofrecemos tres sistemas diferentes, en función de las necesidades del cliente. Para aplicaciones, deseos u opciones especiales, no dude en ponerse en contacto con nosotros.

Los diferentes modelos de los que disponemos son:

 

RTP-100, front loading

Rapid Thermal Vacuum Process Oven with ramp-up rate up to 150 K/sec.

 

RTP-100-EP front loading with 200K/sec ramp up rate

Vacuum compliant Rapid Thermal Process Oven with ramp-up rate up to 200 K/sec.

 

RTP-100-HV (High Vacuum) front loading

High vacuum compliant Rapid Thermal Process Oven with ramp-up rate up to 150 K/sec.

 

RTP-100-HV-EP (High Vacuum) front loading with 200K/sec ramp up rate

High vacuum compliant Rapid Thermal Process Oven with ramp-up rate up to 200 K/sec.

 

RTP-150, front loading

Rapid Thermal Vacuum Process Oven with ramp up rate up to 75 K/sec.

 

RTP-150-EP (NEW), front loading

Rapid Thermal Vacuum Process Oven with ramp up rate up to 150 K/sec.

 

 

RTP-150-HV (High Vacuum), front loading

High vacuum compliant Rapid Thermal Process Oven with ramp up rate up to 75 K/sec.

 

RTP-200

NEW: RTP-200 for 200 mm(8″) wafer size or M10 182 x 182 mm solarwafer

 

 

 

 

 

 

 

VPO-300 (automatic vertical open/close)

up to 10E-6 hPa vacuum (optional)

 

 

VPO-300-HV

VPO-300 HV Vacuum Process Oven with high vacuum

 

 

Para ampliar información: info@irida.es