Step heights can be measured very accurately and provide a proper correction factor for the Z-dimension. The measurements can be based on automated histogram analysis or the ISO 5436 standard. Lateral Calibration
The lateral calibration is done in three easy steps:
- Acquire an image by your instrument
- Load the image file into SPIP™
- Enter the reference values
… and with a few mouse clicks you will have the most accurate calculations of a comprehensive set of correction parameters, including scaling factors, the X-Y coupling factor, and linearity parameters described by third order polynomials.
Advanced sub-pixel Fourier and correlation algorithms ensure the highest accuracy. You can apply the parameters for off-line correction or transfer them to your instrument for on-line correction.