Vertical Calibration

Step heights can be measured very accurately and provide a proper correction factor for the Z-dimension. The measurements can be based on automated histogram analysis or the ISO 5436 standard. Lateral Calibration

Lateral Calibration

The lateral calibration is done in three easy steps:

  • Acquire an image by your instrument
  • Load the image file into SPIP™
  • Enter the reference values

… and with a few mouse clicks you will have the most accurate calculations of a comprehensive set of correction parameters, including scaling factors, the X-Y coupling factor, and linearity parameters described by third order polynomials.

Advanced sub-pixel Fourier and correlation algorithms ensure the highest accuracy. You can apply the parameters for off-line correction or transfer them to your instrument for on-line correction.

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