Peltier-Module for the SEM

This Peltier-Module can be mounted to the SEM stage «like a specimen». A new temperature exchanger geometry inside the module allows rapid temperature changes and precise control within a 1/10°C using the PID-controller, which is part of this package.

  • temperature range -25°C to +50°C (at 3mbar with ambient at 20°C)
  • extended temp. range -50°C to +100°C!
  • temperature accuracy ±1°C
  • display resolution 0,1°C
  • temperature stability ±0,1°C
  • heating / cooling rate 30°C per minute!
  • specimen current measurement capability!
  • PID-controller included
  • interface RS 232, USB, etc.
  • software integration for most SEM available
  • stand-alone-capability
  • quick-lock connectors
  • turn-key-system (pnp)

Cryo-Module 80 Kelvin

This «Cryo module» can be mounted to the SEM stage «like a large specimen». The temperature exchanger geometry inside the cryostat body, the so-called «whirlpool»-chamber, runs at very low vibration level, and minimum liquid nitrogen consumption. Liquid (or in some applications, gaseous) nitrogen flows through the chamber. Any temperature from room temperature down to 80 Kelvin can be kept constant using the PID-controller, which is part of this package.

Cryo-Stage 5 Kelvin

Detachable «Cryo-Substage» for lowest temperatures, mounted to a slightly modified original specimen stage of the Zeiss DSM 960 scanning electron microscope. Principle of the cryostat: continuous evaporation chamber for liquid Helium.

Heating Module 300° C

The photo shows the 300°C heating system. with specimen clamps on the top surface. Specimens up to about 20 mm x 20 mm can be observed in the SEM, at temperatures ranging from ambient to 300 degrees. Thermal contact to the specimen stage was minimized, so that no damage will occur. Different from a number of other heating platforms, this module allows working at air up to full temperature.

Heating Module 500° C

For the observation of small specimens in the SEM a heating module fulfills several requirements. There must be an orifice at the top. The temperature transfer from the module to the stage mechanics is as low as possible. A multi-layer reflecting shield inside the furnace focuses the radiation back towards the center area, where the specimen is located.
The specimen holder can be made in many individual shapes, usually in form of a depression or “nest” in the middle. Flat specimens or even crucibles can be clamped down with fine tungsten springs. Much care was taken to avoid electrical fields that may affect the SEM image. The vacuum feedthrough flange and mounting hardware and a processor controlled water cooling system are part of the shipment volume.

Heating Module 800° C

For the observation of small specimens in the SEM a heating module fulfills several requirements. There must be an orifice at the top. The temperature transfer from the module to the stage mechanics is as low as possible. A multi-layer reflecting shield inside the furnace focuses the radiation back towards the center area, where the specimen is located.
The specimen holder can be made in many individual shapes, usually in form of a depression or “nest” in the middle. Flat specimens or even crucibles can be clamped down with fine tungsten springs. Much care was taken to avoid electrical fields that may affect the SEM image. The vacuum feedthrough flange and mounting hardware and a processor controlled water cooling system are part of the shipment volume.

Heating Module 1050° C

Heating stage (module) for elevated temperature experiments, with moveable lid for SEM in-situ examination. Metallurgical and materials science studies benefit from specimen heating in the SEM. Dynamic observations of phase transitions and other microstructural changes with respect to temperature can be informative for materials research and failure analysis. Using specialized equipment, dynamic gas reactions can be studied. The effect of re-crystallisation can be observed using the combination of specimen heating and electron backscattered diffraction (EBSD).

Heating Module 1500° C

This substage (or “module”) for heating experiments (room temperature to 1500° C) was designed also for the use in a “variable pressure” type SEM. It is clamped to the SEM stage like a large specimen. The module is suitable for corrosion experiments, and heating under gas or vapor (for T=<600°C only!). (NO Oxygen, NO Water) As an option, a needle valve at the vacuum feed-through flange allows fine controlled “bleeding” of gas or of vapor into the heating chamber, during the heating process. This small chamber can be closed by a motorized “lid” during the heating experiment to protect the inside of the SEM.

 

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