Situ parking station

PHI Quantera IIScanning XPS Microprobe

The core technology of the Quantera II is PHI’s patented, monochromatic, micro-focused, scanning x-ray source which provides excellent large area and superior micro-area spectroscopy performance. Spectroscopy, depth profiling, and imaging can all be performed over the full range of x-ray beam sizes including the minimum x-ray beam size of less than 7.5 µm. In addition to superior XPS performance characteristics the Quantera II provides two in situ sample parking stations which enables the automated analysis of all three sample platens in a single user defined analysis queue.

  • Micro-Focused Scanning X-ray Source
  • Micro Area Spectroscopy
  • Thin Film Analysis
  • Automated Analysis
  • SmartSoft-XPS
  • MultiPak Data Reduction Software
  • Features & Accessories
  • SXI Demo Video

Micro-Focused Scanning X-ray Source

Unique Technology

  • Micro-focused, raster scanned x-ray beam
  • X-ray beam induced secondary electron imaging
  • XPS images with spectra at each pixel for retrospective chemical analysis
  • Point or multi-point spectroscopy
  • Point or multi-point thin film analysis
Micro-focused scanning X-ray source equipment

Micro Area Spectroscopy

Superior Micro Area Performance

  • Micro-focused raster scanned x-ray beam
  • Minimum beam size < 7.5 µm in diameter
  • Confidently locate small features for analysis using x-ray beam induced secondary electron images
  • Highest small area XPS sensitivity
Opitcal image of patterned metallization structure
Optical image of patterned metallization structure showing the SXI imaged area.
X-ray beam induced secondary electron image
X-ray beam induced secondary electron image (SXI)
Spectra from selected areas
Spectra from selected areas obtained using a 20 µm diameter x-ray beam show Cu on the surface of the metal pads and SiO2 off of the pads.

Thin Film Analysis

Inorganic thin film analysis
2 keV sputter depth profile of the surface species on a solder ball used for semiconductor packaging

Inorganic Thin Film Analysis

  • 0-5 kV floating column ion gun
  • Low voltage depth profiling for ultra-thin films
  • Compucentric Zalar rotation
  • Effective dual beam charge neutralization Bend in column to stop neutrals
  • Micro-area depth profiling
  • Multi-point depth profiling
organic thin film analysis
10 keV C60 depth profile of a 50/50 rapamycin and PLGA film showing segregation of the rapamycin to the surface of the coating.

Organic Thin Film Analysis

  • Optional Ar2500+ and C60 cluster source ion guns
  • Mass filtered mass ion beam
  • Sputters many polymer and organic materials without damaging their chemistry

Automated Analysis

High Throughput Automated Analysis

  • Robust Auto-Z sample alignment
  • Turnkey dual beam charge neutralization
  • Move without concern from insulator to conductor in auto analysis sequences
  • No special sample mounting or masking
Automated Analysis Equipment

Fully Automated Unattended Analysis

Solder bump analysis
Solder Bump
Plastic lens analysis
Plastic Lens
Steel razor blade analysis
Steel Razor Blade
Blue polymer pieces analysis
Blue Polymer Pieces


SmartSoft-XPS Software

Whether you are a casual user or an expert, the work flow driven UI and enhanced feature set will increase your productivity.

  • Intuitive single window user interface
  • Session tabs guide you through the analysis process
  • Integrated sample platen management
  • Point and click analysis area definition on saved images
  • User friendly queuing of multiple analysis tasks
  • Multi-point analysis and sputter depth profiling within an imaged area
  • Fully integrated control of optional accessories

MultiPak Data Reduction Software

MultiPak data reduction software
Chemical depth profile of a multi-layer Ni-Cr thin film structure showing the presence of Cr metal and Cr oxide layers.

Data Reduction for XPS and AES

PHI MultiPak is the most comprehensive data reduction and interpretation software package available for electron spectroscopy. The tasks of spectral peak identification, extracting chemical state information, quantification, and detection limit enhancement are addressed with an array of powerful and easy-to-use software tools for spectra, line scans, images and depth profiles. Microsoft Windows XP and Windows 7 compatible, MultiPak can be used on the instrument PC to process data in real time or on an off line PC for report generation.

Advanced Data Reduction Tools

  • Auto peak identification
  • XPS chemical state database
  • XPS spectral deconvolution
  • Quantitative analysis
  • Non-linear least squares fitting
  • Linear least squares fitting
  • Target factor analysis
  • Retrospective chemical imaging
  • Batch mode data processing

Features & Accessories

Standard Features

  • Scanned, micro-focused, monochromatic x-ray beam
  • X-ray beam induced secondary electron imaging
  • Dual beam charge neutralization
  • 128 channel mode detection
  • Large area XPS
  • Micro-area XPS
  • Chemical state imaging
  • Thin film analysis
  • Floating column argon ion gun
  • Compucentric Zalar rotation
  • Angle dependent XPS
  • Five axis automated sample manipulator
  • 75 X 75 mm sample holders
  • Two in-situ sample parking stations
  • Robotic sample handling