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Heidelberg Instruments Delivers High-Resolution DWL 66+ Lithography System to NASA’s Goddard Space Flight Center in Greenbelt
“Heidelberg Instruments Mikrotechnik GmbH, the leading supplier of maskless optical lithography systems, is proud to announce the delivery of a DWL 66+ direct write lithography system with the high-resolution mode to NASA’s Goddard Space Flight Center in Greenbelt, MD. The high-resolution mode allows the user to pattern features down to 300nm features size. It is