txyzrEucentric Five Axis Table

The E5AT stage is a five-axis positioning tool especially designed to allow tilting samples to ±90 deg while allowing unlimited rotation of the sample and keeping the area of interest at the eucentric position. The system consists of a small four-axis substage mounted on a tilting platform. The substage offers a range of 10 mm by 10 mm in the X and Y directions and 3 mm in the Z direction. Additionally, the rotational axis allows unlimited rotation of the sample through 360 deg. The tilting platform is fitted with a positional encoder with a resolution of 0.1 deg. Brochure

Substage 10mmStage with 10 mm travel

Our range of stages are suited for orthogonal positioning solutions in atmosphere, SEM/FIB, UHV and at low temperatures.

The LT3310 is primarily used in SEM/FIB to enhance the accuracy and functionality of the standard microscope stage. Its smooth motion and rotational axis make it ideal for cell counting. In addition, the LT3310 is designed for nanomanipulation applications where weight and space are highly restricted and for high-precision work in extreme environments. Brochure

Flat SubstageSuperflat stage with 10 mm travel

The SFLT10 substage is fitted with next generation piezo technology. Its primary use is in SEM/FIB, coupled with the Prober Shuttle, where it provides smooth and precise two- or three-dimensional movement of the sample. It’s extremely low profile makes it ideal for other uses in tight spots.

 

Substage 10mm(2)Stage with 10 mm travel and four axis

This compact four axis substage yields a high degree of freedom for a multitude of applications in FIB/SEM or UHV environments. Its smooth motion and rotational axis make it ideal for precision operations. In addition, the LT3310 is designed for nanomanipulation applications where weight and space are highly restricted and for high-precision work in extreme environments.

 

Substage 20mm (2)Stage with 20 mm travel

Our range of stages are suited for orthogonal positioning solutions in atmosphere, SEM/FIB, UHV and at low temperatures.

The LT6620 is primarily used in SEM/FIB to enhance the accuracy and functionality of the standard microscope stage. It is designed for large-range high-precision applications in extreme environments.

It is not fitted with positional encoders and is thus the economical alternative to the LT6820 substage for applications where repeatability or automization is not required. Brochure

Substage 20mmStage with 20 mm travel and 100 nm repeatability

Our range of stages are suited for orthogonal positioning solutions in atmosphere, SEM/FIB, and UHV.

The LT6820 is primarily used in SEM/FIB to enhance the accuracy and functionality of the standard microscope stage. It is an economical and technically superior alternative to laser interferometer stages.

It is designed specifically for lithography, cell counting and failure analysis applications and is fitted with positional encoders allowing 100 nm repeatability on the X and Y axes. Brochure

Substage 30mmStage with 30 mm travel and 50 nm repeatability

Our range of stages are suited for orthogonal positioning solutions in atmosphere, SEM/FIB, and UHV.

The LT12830 is primarily used in SEM/FIB to enhance the accuracy and functionality of the standard microscope stage. It is an economical and technically superior alternative to laser interferometer stages.

It is built specifically for lithography, cell counting, nanoprobing, and failure analysis applications and contains two positional encoders per axis for automatic yaw error compensation.

Optional software for three-point alignment is available. Brochure

Lift-outLift-out Shuttle

In-situ lift-out techniques have become more reliable methods for preparation of samples requiring TEM and atom probe inspection. However, despite their new-found popularity, they remain considerably more expensive than ex-situ lift-out techniques and require lots of valuable time in the Focused Ion Beam (FIB). Time and cost factors call for a faster, simpler procedure without reducing the reliability of the technique.

The Lift-out Shuttle is our answer to this problem: a simple and efficient tool offering the benefits of decreased cost, increased sample throughput, reduced FIB time and reliable results. Brochure

Rotational AxisRotational axis

The RoTip Shuttle is a stand-alone rotational axis for use in conjunction with the MM3A-EM micromanipulator. It enhances your system by providing a fourth degree of freedom that is required for numerous SEM and FIB applications.

Utilizing a load lockable base, the RoTip Shuttle can be introduced into the vacuum chamber without venting. The RoTip Shuttle is equipped with a receptacle for standard microscopy stubs so that the platform can be fitted with a sample as well as a TEM grid holder.

A TEM grid holder or a larger sample can be inserted into the front of the axis and rotated with a resolution of 0.1° per step, allowing applications such as advanced TEM prep, tomography and STEM to be performed with ease.

Your existing MM3A-EM micromanipulator system can be quickly and easily upgraded for use with the RoTip Shuttle.

Rocking StageRocking Stage

The Rocking Stage adds an additional degree of freedom to your SEM’s or FIB/SEM’s sample stage. This axis is a rotation that is perpendicular to the microscope stage’s rotation axis.