NanolatheNanolathe

The nanolathe is a stand-alone rotational axis for use in conjunction with the MM3A-EM micromanipulator. It enhances your system by providing a means to continuously rotate a specific region of interest concentrically under the electron beam.

A sample can be inserted into the top of the vertically oriented axis and rotated with a resolution of 10e-7 rad per step, allowing applications like true FIB lathe milling and tomography to be performed with ease. Brochure

Your existing MM3A-EM micromanipulator system can be quickly and easily upgraded for use with the nanolathe.

SEM CameraSEM camera

This small CCD camera can be mounted inside your SEM chamber as a stand-alone tool, or together with your MM3A-EM manipulator system. With a field of view of 3 mm and specialized light source, approaching sample surface with probe tips is made even easier. As the SEMCAM views the approaching tip from the side – as opposed to the “bird’s-eye-view” given by the SEM – the approach can be done in less than thirty seconds.

STASafe tip approach

The STA tool is a tunnel current sensor for the MM3A-EM micromanipulator system and LCMK-EM plug-in. It enhances your system by providing a simple, accelerated and secure method for approaching the surface of conductive samples.

The STA greatly reduces the risk of damaging the probe tip and the sample when approaching a region of interest, even for inexperienced users. It also offers a valuable time reduction thus increasing throughput. Brochure

Your existing MM3A-EM micromanipulator system can be quickly and easily upgraded for use with the STA.

ebicEBIC & RCI (EBAC) amplifier

We have designed an easy-to-use EBIC and RCI nanoprobing analysis tool which is compatible with most commercially available SEM’s and FIB’s. Our system consists of two MM3A-EM micromanipulators, at least one of which is equipped with a low-current measurement kit (LCMK-EM) and a signal amplifier. The amplifier is connected to the video input of the microscope.

Primary applications are open detection in integrated circuits, visualization of p-n junctions and localization of resistivity changes in via chains.

Though mainly used for semiconductor failure analysis, this tool can be used for any application that requires accurate measurement of low currents. It can be quickly and easily added to your existing MM3A-EM micromanipulator system. Brochure

Spring tableSpringTable & Force Measurement Analysis Software

The STFMA package is an ingenious and low-tech way of measuring forces in-situ in an SEM. The SpringTable relies on the microscope’s high resolution power to deliver force measurements quickly and easily. As the video below shows in detail, the data is collected by deflecting the table – which has a well defined and known spring constant – by a given distance while recording images with the SEM. Each amount of deflection corresponds to a force. The Force Measurement Analysis software processes the image files, reading out the header info and detecting the deflection (both of the substrate and the sample) and convolutes this data to yield a force distance curve. Brochure

HeatingMicro Heating Stage

The Micro Heating Stage is a stand alone system for adding a miniaturized heating stage to your experimental setup. The unit has an integrated heating and sensing system in order to maintain the temperature set using the included Temperature Control System.

Your existing micromanipulator system can be quickly and easily upgraded for use with the Micro Heating Stage.