ps8Probe Shuttle (PS8)

The Prober Shuttle is our latest tool for high-precision in-situ electrical nanoprobing on the 14 nm technology node – and beyond! In order to realise our vision for this product, we developed an ultra-flat three-axis manipulator with unmatched stability and precision – the MM4. The Prober Shuttle can be comprised of up to eight MM4s with the option of an ultra-flat two-axis or three-axis substage.

The entire height of the system is 10 mm, making it compatible with a wide range of SEM load-locks and thus helping you to achieve a higher sample throughput. The Prober Shuttle also offers low-current, low-capacity measurement capability and is fully compatible to the Advanced Probing Tools hardware and software suite including the Live Contact Tester and Electron Beam Induced Current imaging modules. Brochure

ps4Probe Shuttle (PS4)

The Prober Shuttle is our latest tool for high-precision in-situ electrical nanoprobing. In order to realise our vision for this product, we developed an ultra-flat three-axis manipulator with unmatched stability and precision – the MM4. The Prober Shuttle can be comprised of either two or four MM4s with the option of an ultra-flat two-axis or three-axis substage.

The entire height of the system is 9 mm, making it compatible with a wide range of SEM load-locks and thus helping you to achieve a higher sample throughput. The Prober Shuttle also offers low-current, low-capacity measurement capability and is fully compatible to the Advanced Probing Tools hardware and software suite including the Live Contact Tester and Electron Beam Induced Current imaging modules. Brochure